• DocumentCode
    878257
  • Title

    Etch slope compensation for planar silica waveguide lens pair

  • Author

    Mackenzie, M. ; Kwok, C.Y. ; Michael, A. ; Yu, K. ; Kaalund, C.

  • Author_Institution
    Sch. of Electr. Eng. & Technol., UNSW, Sydney, NSW, Australia
  • Volume
    42
  • Issue
    6
  • fYear
    2006
  • fDate
    3/16/2006 12:00:00 AM
  • Firstpage
    345
  • Lastpage
    346
  • Abstract
    A silica lens pair has been designed to facilitate the free-space optical propagation between opposing planar waveguides. Each lens consists of a graded refractive index slab with a convexly shaped front face. A technique for compensating for the non-vertical etch of the front face curvature is described and shown to result in a significant reduction of optical loss.
  • Keywords
    compensation; gradient index optics; lenses; optical planar waveguides; refractive index; sputter etching; PECVD; RIE techniques; convexly shaped front face; etch slope compensation; free-space optical propagation; front face curvature; graded refractive index slab; planar waveguides; silica lens pair;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20064434
  • Filename
    1610422
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=878257