DocumentCode
885404
Title
Hard targets
Author
Collins, Luke
Volume
5
Issue
2
fYear
2007
Firstpage
28
Lastpage
31
Abstract
MEMS design means being able to tie the electrical world to the mechanical. One of the big problems with MEMS lies in design - finding the right people to do it and creating the tools and flows to make it, if not easy, then at least tractable. Another major issue for MEMS is encapsulation - packaging a part well enough that its moving or sensing elements do not get contaminated with water vapour or organic matter. This issue has been the rock on which a number of MEMS start-ups, particularly in the timing market, have already foundered
Keywords
encapsulation; micromechanical devices; MEMS design; encapsulation; micromechanical devices; packaging;
fLanguage
English
Journal_Title
Electronics Systems and Software
Publisher
iet
ISSN
1479-8336
Type
jour
Filename
4212128
Link To Document