• DocumentCode
    885404
  • Title

    Hard targets

  • Author

    Collins, Luke

  • Volume
    5
  • Issue
    2
  • fYear
    2007
  • Firstpage
    28
  • Lastpage
    31
  • Abstract
    MEMS design means being able to tie the electrical world to the mechanical. One of the big problems with MEMS lies in design - finding the right people to do it and creating the tools and flows to make it, if not easy, then at least tractable. Another major issue for MEMS is encapsulation - packaging a part well enough that its moving or sensing elements do not get contaminated with water vapour or organic matter. This issue has been the rock on which a number of MEMS start-ups, particularly in the timing market, have already foundered
  • Keywords
    encapsulation; micromechanical devices; MEMS design; encapsulation; micromechanical devices; packaging;
  • fLanguage
    English
  • Journal_Title
    Electronics Systems and Software
  • Publisher
    iet
  • ISSN
    1479-8336
  • Type

    jour

  • Filename
    4212128