DocumentCode
886680
Title
Elevated electrode integrated circuits
Author
Sakai, Tetsushi ; Yamamoto, Yousuke ; Kobayashi, Yoshiji ; Yamauti, Hironori ; Ishitani, Tsunehachi ; Sudo, Tsuneta
Volume
14
Issue
2
fYear
1979
fDate
4/1/1979 12:00:00 AM
Firstpage
301
Lastpage
307
Abstract
The authors developed a new device structure for a bipolar integrated circuit with a propagation delay time of 85 ps/gate and a speed-power product of 0.19 pJ. The remarkable feature of this integrated circuit is its overhanging structure of elevated emitter and collector electrodes, resistors, and interconnections. This article describes the structure, fabrication process, and performance of this integrated circuit.
Keywords
Bipolar integrated circuits; Integrated circuit technology; Integrated logic circuits; bipolar integrated circuits; integrated circuit technology; integrated logic circuits; Bipolar integrated circuits; Electrodes; Electron beams; Electron traps; Integrated circuit technology; MOSFET circuits; Physics; Silicon; Temperature; Very large scale integration;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/JSSC.1979.1051178
Filename
1051178
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