Marvelous MEMS

Author

Bryzek, Janusz ; Roundy, Shad ; Bircumshaw, Brian ; Chung, Charles ; Castellino, Kenneth ; Stetter, Joseph R. ; Vestel, Michael

Author_Institution

LV Sensors Inc., Emeryville, CA, USA

Volume

22

Issue

2

fYear

2006

Firstpage

8

Lastpage

28

Abstract

Microelectromechanical systems (MEMS) are a foundation for a broad range of mechanical, chemical, optical, and biotech products (sensors, microstructures and actuators) fabricated as integrated circuits on (primarily) silicon wafers in a batch mode. Commercial MEMS products include pressure sensors, acceleration sensors, gyros, ink-jet nozzles, read-write head positioners in hard drives, and digital light processors (DLPs) in projectors and television sets. The first four decades of MEMS development created a US$8 billion market. During the next decade, the MEMS market is estimated to increase by US$32 billion. Based on the presented overview of emerging MEMS sensors and microstructures, such a magnitude of growth is definitely possible.

Keywords

micromechanical devices; microsensors; product development; MEMS development; MEMS market; MEMS sensors; advanced integrated circuit sensors; microelectromechanical systems; Biomedical optical imaging; Biosensors; Chemical and biological sensors; Chemical products; Chemical sensors; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Microstructure; Optical sensors;

fLanguage

English

Journal_Title

Circuits and Devices Magazine, IEEE

Publisher

ieee

ISSN

8755-3996

Type

jour

DOI

10.1109/MCD.2006.1615241

Filename

1615241