• DocumentCode
    892479
  • Title

    Control issues for microelectromechanical systems

  • Author

    Borovic, B. ; Lewis, Frank L. ; Kolesar, E.S. ; Popa, Dan O.

  • Volume
    26
  • Issue
    2
  • fYear
    2006
  • fDate
    4/1/2006 12:00:00 AM
  • Firstpage
    18
  • Lastpage
    21
  • Abstract
    This paper highlights some microelectromechanical systems (MEMS) control issues and provides an overview of MEMS control.
  • Keywords
    closed loop systems; microcontrollers; micromechanical devices; open loop systems; stability; vibrations; MEMS control; closed loop system; lateral instability; microelectromechanical systems; open loop system; vibrational modes; Actuators; Control systems; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Open loop systems; Optical attenuators; Optical control; Optical fibers; Optical variables control;
  • fLanguage
    English
  • Journal_Title
    Control Systems, IEEE
  • Publisher
    ieee
  • ISSN
    1066-033X
  • Type

    jour

  • DOI
    10.1109/MCS.2006.1615266
  • Filename
    1615266
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=892479