DocumentCode
897981
Title
A Wafer-Scale Digital Integrator Using Restructurable VSLI
Author
Raffel, J.I. ; Anderson, A.H. ; Chapman, G.H. ; Konkle, K.H. ; Mathur, B. ; Soares, A.M. ; Wyatt, P.W.
Volume
20
Issue
1
fYear
1985
Firstpage
399
Lastpage
406
Abstract
Wafer-scale integration has been demonstrated by fabricating a digital integrator on a monolithic 20-cm/sup 2/ silicon chip, the first laser-restructured digital logic system. Large-area integration is accomplished by laser programming of metal interconnect for defect avoidance. This paper describes the technology for laser welding and cutting, the design methodology and CAD tools developed for wafer-scale integration, and the integrator itself.
Keywords
CMOS integrated circuits; Cellular arrays; Circuit layout CAD; Digital arithmetic; Integrated circuit technology; Laser beam applications; Redundancy; Design automation; Design methodology; Dielectrics; Joining processes; Laser beam cutting; Optical device fabrication; Silicon; Wafer scale integration; Welding; Wiring;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/JSSC.1985.1052320
Filename
1052320
Link To Document