• DocumentCode
    902541
  • Title

    Effect of glow discharge on chromium thin-film resistance

  • Author

    Dembicka¿¿Jellonkowa, S. ; Murawski, E.

  • Author_Institution
    Wroc¿aw Technical University, Wroc¿aw, Poland
  • Volume
    2
  • Issue
    8
  • fYear
    1966
  • fDate
    8/1/1966 12:00:00 AM
  • Firstpage
    292
  • Lastpage
    293
  • Abstract
    The resistivity of thin vacuum-evaporated chromium films varies significantly after deposition. Glow-discharge treatment immediately after deposition slowly increases the sheet resistance, and improves its stability during exposure to air and subsequent heat aging. This treatment enables a stable chromium film to be obtained with a sheet resistivity above 400 ¿/square.
  • Keywords
    chromium; discharges (electric); electrical conductivity; films; glow discharges; instrumentation; integrated circuits; metals; resistors;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19660244
  • Filename
    4233176
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=902541