DocumentCode
906344
Title
Calibration-free heat source localisation in ICs entirely covered by metal layers
Author
Altet, J. ; Salhi, M.A. ; Dilhaire, S. ; Ivanov, A.
Author_Institution
Electron. Eng. Dept., Univ. Politecnica de Catalunya, Barcelona, Spain
Volume
40
Issue
4
fYear
2004
Firstpage
241
Lastpage
242
Abstract
The localisation of devices that generate periodically activated hot spots in a CMOS IC comprising five metal layers and metal fills is addressed. The feasibility of using the phase shift of the displacement of the uppermost metal layer due to thermal expansions is demonstrated.
Keywords
CMOS integrated circuits; MOSFET; filler metals; phase shifters; thermal expansion; CMOS IC; calibration free heat source localisation; hot spots; metal fills; metal layers; phase shift; thermal expansion;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20040172
Filename
1269481
Link To Document