DocumentCode
906819
Title
The feasibility of a heterode pressure transducer
Author
Moore, R. Max
Volume
57
Issue
8
fYear
1969
Firstpage
1433
Lastpage
1434
Abstract
Several simple pressure transducers have been built by using heterode strain sensors evaporated directly onto a pressure diaphragm. The performance of these units indicates that pressure transducers are a feasible area of application for the heterode strain sensor, and that such transducers are potentially inexpensive and easily adapted to a variety of pressure ranges.
Keywords
Capacitive sensors; Electromechanical sensors; Fabrication; Hysteresis; Mechanical sensors; Semiconductor diodes; Sensor phenomena and characterization; Silicon; Substrates; Transducers;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1969.7289
Filename
1449219
Link To Document