• DocumentCode
    911450
  • Title

    Delay Correction for Accurate Extraction of Time Exponent and Activation Energy of NBTI

  • Author

    Ielmini, Daniele ; Gattel, Francesco

  • Author_Institution
    Dipt. di Elettron. e Inf., Politec. di Milano, Milan
  • Volume
    30
  • Issue
    6
  • fYear
    2009
  • fDate
    6/1/2009 12:00:00 AM
  • Firstpage
    684
  • Lastpage
    686
  • Abstract
    Negative-bias temperature instability (NBTI) represents one of the most severe reliability issues for pMOS transistors in logic and analog applications. Accurate reliability predictions require physically based models for NBTI and accurate methods for the estimation of time and temperature kinetic parameters, namely, the power-law time exponent and the activation energy. Describing on-the-fly degradation data by power-law time dependence and Arrhenius thermal activation, we present here a new methodology for estimating the power-law exponent and the activation energy. This allows for physics-based compact models and reliability extrapolations of NBTI.
  • Keywords
    MOSFET; extrapolation; semiconductor device models; semiconductor device reliability; Arrhenius thermal activation; activation energy; analog application; delay correction; logic application; negative-bias temperature instability; pMOS transistor; physics-based compact model; power-law exponent estimation; power-law time dependence; power-law time exponent; reliability extrapolation; temperature kinetic parameter; Delay effects; Extrapolation; Kinetic theory; Logic; MOSFETs; Niobium compounds; Predictive models; Temperature; Thermal degradation; Titanium compounds; CMOS reliability; Charge trapping; gate-dielectric reliability; negative-bias temperature instability (NBTI); reliability estimation; reliability modeling;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2009.2020308
  • Filename
    4968009