DocumentCode
911450
Title
Delay Correction for Accurate Extraction of Time Exponent and Activation Energy of NBTI
Author
Ielmini, Daniele ; Gattel, Francesco
Author_Institution
Dipt. di Elettron. e Inf., Politec. di Milano, Milan
Volume
30
Issue
6
fYear
2009
fDate
6/1/2009 12:00:00 AM
Firstpage
684
Lastpage
686
Abstract
Negative-bias temperature instability (NBTI) represents one of the most severe reliability issues for pMOS transistors in logic and analog applications. Accurate reliability predictions require physically based models for NBTI and accurate methods for the estimation of time and temperature kinetic parameters, namely, the power-law time exponent and the activation energy. Describing on-the-fly degradation data by power-law time dependence and Arrhenius thermal activation, we present here a new methodology for estimating the power-law exponent and the activation energy. This allows for physics-based compact models and reliability extrapolations of NBTI.
Keywords
MOSFET; extrapolation; semiconductor device models; semiconductor device reliability; Arrhenius thermal activation; activation energy; analog application; delay correction; logic application; negative-bias temperature instability; pMOS transistor; physics-based compact model; power-law exponent estimation; power-law time dependence; power-law time exponent; reliability extrapolation; temperature kinetic parameter; Delay effects; Extrapolation; Kinetic theory; Logic; MOSFETs; Niobium compounds; Predictive models; Temperature; Thermal degradation; Titanium compounds; CMOS reliability; Charge trapping; gate-dielectric reliability; negative-bias temperature instability (NBTI); reliability estimation; reliability modeling;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2009.2020308
Filename
4968009
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