DocumentCode
924148
Title
X-band silicon double-drift IMPATT diodes using multiple epitaxy
Author
Ying, R.S.
Volume
60
Issue
9
fYear
1972
Firstpage
1104
Lastpage
1105
Abstract
Silicon double-drift IMPATT diodes made by consecutive epitaxial deposition have been fabricated successfully. Output power in excess of 1.7 W with 10-percent efficiency was obtained at X band.
Keywords
Boron; Charge carrier processes; Epitaxial growth; Epitaxial layers; Frequency; Impedance; Ion implantation; Semiconductor diodes; Silicon; Substrates;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1972.8861
Filename
1450791
Link To Document