System design for cooperative control of a microactuator array

Author

Konishi, Satoshi ; Fujita, Hiroyuki

Author_Institution

Inst. of Ind. Sci., Tokyo Inst. of Technol., Japan

Volume

42

Issue

5

fYear

1995

fDate

10/1/1995 12:00:00 AM

Firstpage

449

Lastpage

454

Abstract

A system design is presented with the aim of controlling many microactuators as autonomous distributed micromachines (ADMs). ADMs consist of many microcells which are smart enough to control their own motions and to cooperate with each other. A conveyance system in a plane is selected as an example of ADMs. We have developed a practical design of ADMs composed of many microcells integrated with actuators, sensors, and circuits which can be fabricated by IC-compatible micromachining. The behavior of the system is examined by simulation on a computer model. A fluidic microactuator array for a conveyor has also been fabricated and operated successfully

Keywords

digital simulation; electronic engineering computing; microactuators; micromachining; position control; simulation; IC-compatible micromachining; autonomous distributed micromachines; circuits; computer model; conveyance system; cooperative control; microactuator array; microcells; sensors; simulation; system design; Actuators; Add-drop multiplexers; Circuits; Computational modeling; Control systems; Intelligent sensors; Microactuators; Microcell networks; Micromachining; Motion control;

fLanguage

English

Journal_Title

Industrial Electronics, IEEE Transactions on

Publisher

ieee

ISSN

0278-0046

Type

jour

DOI

10.1109/41.464606

Filename

464606