DocumentCode
929020
Title
A graphical method to determine the generation parameters from pulsed MIS capacitors
Author
Kang, Jung S. ; Kim, Sang U. ; Schroder, Dieter K.
Author_Institution
Intel Corp., Chandler, AZ, USA
Volume
39
Issue
4
fYear
1992
fDate
4/1/1992 12:00:00 AM
Firstpage
1009
Lastpage
1011
Abstract
A graphical method for the determination of semiconductor generation parameters has been developed. This technique is based on two graphs which are plotted from a general expression of capacitance-time ( C -t ) behavior and a measured C -t curve of a pulsed metal-insulator-semiconductor capacitor (MIS-C). The generation lifetime and the surface generation velocity obtained by this method agree very well with those obtained by the Zerbst technique
Keywords
capacitance; carrier lifetime; metal-insulator-semiconductor devices; Zerbst technique; capacitance time behaviour; generation lifetime; generation parameters; graphical method; metal-insulator-semiconductor; pulsed MIS capacitors; semiconductor; surface generation velocity; Capacitance; Capacitors; Character generation; Genetic expression; Insulation; Pulse generation; Pulse measurements; Semiconductor devices; Solid state circuits; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.127496
Filename
127496
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