• DocumentCode
    931605
  • Title

    Etched Mirror and Groove-Coupled GalnAsP/lnP Laser Devices for Integrated Optics

  • Author

    Coldren, Larry A. ; Furuya, Kazuhito ; Miller, Barry I. ; Rentschler, John A.

  • Volume
    30
  • Issue
    10
  • fYear
    1982
  • Firstpage
    1667
  • Lastpage
    1676
  • Abstract
    Recent advances in wet and dry etching techniques for CaInAsP/InP laser structures allow the reproducible fabrication of planar and vertical walled facets and grooves. These elements provide efficient mirrors and interstage couplers that may provide the basis for a new generation of monolithic integrated optical devices. Initial experimental results on etched facet lasers and groove-coupled two-section lasers verify theoretical expectations.
  • Keywords
    Chemical lasers; Indium phosphide; Integrated optics; Laser theory; Mirrors; Optical coupling; Optical device fabrication; Optical devices; Reproducibility of results; Wet etching;
  • fLanguage
    English
  • Journal_Title
    Microwave Theory and Techniques, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9480
  • Type

    jour

  • DOI
    10.1109/TMTT.1982.1131307
  • Filename
    1131307