Design and performance of thin metal film interconnects for skin-like electronic circuits

Author

Lacour, S.P. ; Jones, J. ; Suo, Z. ; Wagner, S.

Author_Institution

Dept. of Electr. Eng., Princeton Univ., NJ, USA

Volume

25

Issue

4

fYear

2004

fDate

4/1/2004 12:00:00 AM

Firstpage

179

Lastpage

181

Abstract

We prepare stretchable electrical conductors of 25-nm-thick gold films on elastomeric substrates prestretched by 15%. When the substrates relax from the prestretch, the gold stripes form surface waves with /spl sim/8.4-μm wavelength and /spl sim/1.2-μm amplitude. When the strain is cycled between 0 and 15%, both the wave pattern and the electrical resistance of the gold stripes change in reproducible cycles. Such repeatedly stretchable metallization can serve as interconnects for skin-like, conformal, and electroactive polymer circuits.

Keywords

elastomers; flexible structures; integrated circuit interconnections; metallic epitaxial layers; metallic thin films; metallisation; substrates; thin film circuits; 25 nm; Au; conformal polymer circuits; electrical resistance; electroactive polymer circuits; gold films; prestretched elastomeric substrates; skin-like electronic circuits; skin-like polymer circuits; strain; stretchable electrical conductors; stretchable metallization; surface waves; thin metal film interconnects; wave pattern; Capacitive sensors; Conductive films; Electric resistance; Electronic circuits; Gold; Integrated circuit interconnections; Metallization; Substrates; Surface resistance; Surface waves;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2004.825190

Filename

1278548