YBaCuO-insulator-normal metal tunnel junctions

Author

Ghyselen, B. ; Cabanel, R. ; Garry, G. ; Dubreuil, D. ; Mayca, F. ; Hartemann, P. ; Schuhl, A.

Author_Institution

Thomson-CSD, Lab. Central de Recherches, Orsay, France

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

2397

Lastpage

2400

Abstract

YBaCuO-insulator-normal metal tunnel junctions were fabricated and characterized. The thin insulating barrier was formed using a CHF/sub 3/ treatment in a reactive ion etching system. X-ray photoelectron spectroscopy (XPS) measurements and Auger depth profiling confirmed the formation of a fluorinated surface layer. First electrical results are similar to those generally obtained for natural barriers: no well-defined gap but small gaplike structures; existence of a conductance at zero bias; and an increasing conductance, often linear versus voltage, at high biases.<>

Keywords

Auger effect; X-ray photoelectron spectra; barium compounds; high-temperature superconductors; sputter etching; superconducting junction devices; superconductive tunnelling; yttrium compounds; Ar-trifluoromethane mixture; Auger depth profiling; SrTiO/sub 3/ substrate; X-ray photoelectron spectroscopy; XPS; YBa/sub 2/Cu/sub 3/O/sub 7-x/ tunnel junctions; conductance; fluorinated surface layer; high temperature superconductor; normal metal-insulator-superconductor junction; reactive ion etching system; thin insulating barrier; High temperature superconductors; Insulation; Josephson junctions; Sputter etching; Superconducting devices; Surface contamination; Surface treatment; Tunneling; Voltage; Yttrium barium copper oxide;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233419

Filename

233419