Processing, electrical and microwave properties of sputtered Tl-Ca-Ba-Cu-O superconducting thin films

Author

Subramanyam, G. ; Kapoor, V.J. ; Chorey, C.M. ; Bhasin, K.B.

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

Volume

3

Issue

1

fYear

1993

fDate

3/1/1993 12:00:00 AM

Firstpage

1749

Lastpage

1752

Abstract

A reproducible fabrication process has been established for TlCaBaCuO thin films on LaAlO/sub 3/ substrates by RF magnetron sputtering and post-deposition processing methods. Electrical transport properties of the thin films were measured on patterned four-probe test devices. Microwave properties of the films were obtained from unloaded Q measurements of all-superconducting ring resonators. This paper describes the processing, electrical and microwave properties of Tl/sub 2/Ca/sub 1/Ba/sub 2/Cu/sub 2/O/sub x/ (2122) phase thin films.<>

Keywords

Q-factor; X-ray diffraction examination of materials; calcium compounds; critical current density (superconductivity); electric resistance measurement; high-temperature superconductors; microstrip lines; microwave measurement; penetration depth (superconductivity); sputter deposition; superconducting junction devices; surface conductivity; thallium compounds; 12 GHz; 2122 phase; 77 K; LaAlO/sub 3/ substrate; Q value; Tl/sub 2/CaBa/sub 2/Cu/sub 2/O/sub x/ superconducting thin film; X-ray diffraction analysis; critical current density; high temperature superconductor; microstrip ring resonators; penetration depth; sputter deposition; surface resistance; Electric variables measurement; Fabrication; Microwave devices; Microwave measurements; Optical ring resonators; Q measurement; Radio frequency; Sputtering; Testing; Thin film devices;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/77.233596

Filename

233596