DocumentCode
947427
Title
MOVPE-Grown Ultrasmall Self-Organized InGaN Nanotips
Author
Ji, L.W. ; Chang, S.J. ; Fang, T.H. ; Young, S.J. ; Juang, F.S.
Author_Institution
Nat. Formosa Univ., Yunlin
Volume
7
Issue
1
fYear
2008
Firstpage
1
Lastpage
4
Abstract
It has been demonstrated that self-organized InGaN nanotips can be vertically grown via metal-organic vapor phase epitaxy (MOVPE) and thermal annealing. It was found that typical height of these nanotips is 20 nm with an average width of 1 nm. It was also found that the local density of vertically grown self-organized InGaN nanotips could reach 1.6 times 1013 cm -2. Furthermore, the overall uniformity in both height and width of nanotips were also demonstrated. These small sized vertical nanotips are potentially useful for field emission devices, blue light emitters and near-field microscopy.
Keywords
III-V semiconductors; MOCVD; annealing; atomic force microscopy; gallium compounds; indium compounds; nanostructured materials; self-assembly; vapour phase epitaxial growth; wide band gap semiconductors; InGaN; MOVPE; atomic force microscopy; blue light emitters; field emission devices; metal-organic vapor phase epitaxy; near-field microscopy; nitride-based semiconductor materials; self-organized nanotips; thermal annealing; AFM; Atomic force microscopy (AFM); InGaN; MOVPE; metal–organic vapor phase epitaxy (MOVPE); nanotips; thermal annealing;
fLanguage
English
Journal_Title
Nanotechnology, IEEE Transactions on
Publisher
ieee
ISSN
1536-125X
Type
jour
DOI
10.1109/TNANO.2007.906641
Filename
4359110
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