DocumentCode
951765
Title
Aluminum Bond Pad Contamination by Thermal Outgassing of Organic Material from Silver-Filled Epoxy Adhesives
Author
Khan, Muhib M. ; Tarter, Thomas S. ; Fatemi, Homi
Author_Institution
Advanced Micro Devices Inc.,Sunnyvale,CA
Volume
10
Issue
4
fYear
1987
fDate
12/1/1987 12:00:00 AM
Firstpage
586
Lastpage
592
Abstract
Effects of outgassing from commercial die attach adhesive systems on the mechanical strength of gold aluminum bonds were studied. Bond pad metallizations on unpackaged test dice were exposed to the die attach media under standard cure conditions, and gold bonds were subjected to a steam pressure pot storage. Bond pull strength as well as resistance data were obtained to determine the extent of bond degradation. Bonds exposed to die attach systems containing reactive epoxy diluents were found to cause faster mechanical degradation of the Au/Al bond under steam pressure pot storage as compared with the die attach systems formulated with ester type or other nonreactive solvents. Cleaning the bond pad with N2 /O2 plasma prior to wire bonding was found to dramatically improve the mechanical strength of the bonds. It was determined that the epoxy reactive diluents in some of the die attach systems could deposit on the bond pad during the cure and cause growth and reinforcement of the native Al2 O3 film on the pad surface with a rigid self-polymerized organic resin. This could prevent complete exposure of the underlying metal during the wire bonding process and leave debris within the bond. Wire bonds made under such a condition would be chemically vulnerable to attack by the moisture and the ionic species present in a plastic package.
Keywords
Aluminum integrated circuit conductors; Carbon materials/devices; Epoxy resin materials/devices; Integrated circuit bonding; Integrated circuit mechanical factors; Integrated circuit reliability; Integrated circuit thermal factors; Aluminum; Bonding; Contamination; Degradation; Gold; Metallization; Microassembly; Organic materials; Testing; Wire;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/TCHMT.1987.1134781
Filename
1134781
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