DocumentCode
958213
Title
Performance of sputtered SiO2 film as acoustic antireflection coating at sapphire/water interface
Author
Kushibiki, J. ; Sannomiya, T. ; Chubachi, N.
Author_Institution
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Volume
16
Issue
19
fYear
1980
Firstpage
737
Lastpage
738
Abstract
The effect of sputtered SiO2 films as an acoustic antireflection coating for matching the large acoustic discontinuity at the sapphire/water interface is experimentally and theoretically investigated in a frequency range of 200 to 1100 MHz. By the introduction of SiO2 films, the transmission loss of more than 9 dB at the interface is reduced to less than 1 dB at a quarter-wavelength frequency of SiO2 film with high reproducibility.
Keywords
acoustic microscopes; acoustic wave reflection; antireflection coatings; sapphire; silicon compounds; sputtered coatings; water; acoustic antireflection coating; acoustic discontinuity; acoustic microscopes; sapphire H2O interface; sputtered SiO2 film; transmission loss;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19800524
Filename
4244300
Link To Document