• DocumentCode
    958213
  • Title

    Performance of sputtered SiO2 film as acoustic antireflection coating at sapphire/water interface

  • Author

    Kushibiki, J. ; Sannomiya, T. ; Chubachi, N.

  • Author_Institution
    Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
  • Volume
    16
  • Issue
    19
  • fYear
    1980
  • Firstpage
    737
  • Lastpage
    738
  • Abstract
    The effect of sputtered SiO2 films as an acoustic antireflection coating for matching the large acoustic discontinuity at the sapphire/water interface is experimentally and theoretically investigated in a frequency range of 200 to 1100 MHz. By the introduction of SiO2 films, the transmission loss of more than 9 dB at the interface is reduced to less than 1 dB at a quarter-wavelength frequency of SiO2 film with high reproducibility.
  • Keywords
    acoustic microscopes; acoustic wave reflection; antireflection coatings; sapphire; silicon compounds; sputtered coatings; water; acoustic antireflection coating; acoustic discontinuity; acoustic microscopes; sapphire H2O interface; sputtered SiO2 film; transmission loss;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19800524
  • Filename
    4244300