• DocumentCode
    960523
  • Title

    1D to 1D tunneling in a dual electron waveguide device

  • Author

    del Alamo, Jesus A. ; Melloch, M.R. ; Rooks, Michael J.

  • Volume
    40
  • Issue
    11
  • fYear
    1993
  • fDate
    11/1/1993 12:00:00 AM
  • Firstpage
    2135
  • Lastpage
    2136
  • Abstract
    Summary form only given. The authors report the first unambiguous observation of controlled electron tunneling between two closely spaced 1D electron waveguides. This represents a significant step toward the realization of a quantum field-effect electron directional coupler (QFED). The authors have fabricated a variety of dual electron waveguide devices with different lengths and widths on an AlGaAs/GaAs heterostructure (Ns=4×011 cm-2 and μ=1.2×106 cm2/V-s at 4 K). The key feature in these devices is the 30-nm-wide middle gate fabricated using a single-pass e-beam lithography technique. Such a thin gate is required to achieve significant tunneling. A 1D to 1D regime is established when two electron waveguides are implemented. The tunneling current should be sensitive to the alignment of the subbands in the two electron waveguides. In this regime, bumps in the tunneling current are observed as a function of both side-gate voltages as the individual subbands line up between the two waveguides. This is unmistakable proof that 1D to 1D tunneling is taking place
  • Keywords
    III-V semiconductors; aluminium compounds; directional couplers; electron beam lithography; field effect devices; gallium arsenide; tunnelling; 1D to 1D tunneling; AlGaAs-GaAs; dual electron waveguide device; quantum field-effect electron directional coupler; side-gate voltages; single-pass e-beam lithography technique; subbands; Circuits; Electrons; FETs; Frequency; Gallium arsenide; Lithography; Resonance; Split gate flash memory cells; Tunneling; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.239824
  • Filename
    239824