DocumentCode
961227
Title
Fabrication of a 16-Channel Integrated Optical Data Preprocessor
Author
Hartman, Nile F. ; Verber, Carl M. ; Chapman, Charles M.
Author_Institution
Battelle Columbus Lab, OH
Volume
4
Issue
4
fYear
1981
fDate
12/1/1981 12:00:00 AM
Firstpage
327
Lastpage
331
Abstract
A 16-channel integrated optical data preprocessor based on a Mach-Zhender interferometer configuration has been fabricated on a LiNbO3 substrate. The fabrication procedure is reviewed and a detailed discussion of the steps utilized to integrate the individual components is presented. The results of the device testing experiments are also discussed.
Keywords
Integrated circuit fabrication; Optical waveguides; Electrodes; Integrated optics; Lithography; Optical device fabrication; Optical interferometry; Optical sensors; Optical waveguides; Substrates; Titanium; Voltage;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/TCHMT.1981.1135837
Filename
1135837
Link To Document