Smooth boundary topology optimisation applied to an electrostatic actuator

Smooth boundary topology optimisation in conjunction with the continuum design sensitivity analysis avoids many of the problems encountered by conventional cell-based systems coupled with material homogenisation or the density method. Shape optimisation becomes part of topology optimisation. The effectiveness of the proposed method is demonstrated through the design of an electrostatic MEMS actuator to generate maximum torque for a predefined maximum size (area).