DocumentCode
968795
Title
A two-layer magneto-TLM contact resistance model: application to modulation-doped FET structures
Author
Look, David C.
Author_Institution
Univ. Res. Center, Wright State Univ., Dayton, OH, USA
Volume
35
Issue
2
fYear
1988
fDate
2/1/1988 12:00:00 AM
Firstpage
133
Lastpage
138
Abstract
The resistance for a two-layer structure with planar contacts is derived, with both the contacts and the region between the contacts modeled as transmission lines. Magnetic field effects are included, yielding additional information on mobilities and carrier concentrations. The theory can be fitted to the usual resistance-versus-contact-separation data as a function of magnetic field strength. Fitted parameters include mobilities and carrier concentrations in each layer, both under the contact and in the bulk material between the contacts, as well as specific contact resistivities for the contact barriers. Experimental results are obtained for an AlGaAs/InGaAs modulation-doped FET structure
Keywords
III-V semiconductors; aluminium compounds; carrier density; carrier mobility; contact resistance; gallium arsenide; high electron mobility transistors; indium compounds; semiconductor device models; transmission line theory; AlGaAs-InGaAs; MODFET; carrier concentrations; contact barriers; magnetic field effects; mobilities; modulation-doped FET structures; planar contacts; specific contact resistivities; transmission lines; two-layer magneto-TLM contact resistance model; Conductivity; Contact resistance; Electrical resistance measurement; Epitaxial layers; FETs; HEMTs; MODFETs; Magnetic materials; Ohmic contacts; Sheet materials;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.2431
Filename
2431
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