Microelectronics fabrication training using multimedia and the Web

Integrated circuits are the driving force behind technological breakthroughs and innovative product development in electronics today. ICs are fabricated by a sophisticated series of steps that range in number from dozens to hundreds, depending on the complexity of the circuit function. Although comprehensive training in the field of semiconductor manufacturing requires thorough understanding of all phases of the fabrication process, the study of IC fabrication requires an unusually diverse familiarity with physics, inorganic chemistry, semiconductor devices, and statistics. To alleviate impediments resulting from resource constraints as well as to enhance students´ educational experience, we are developing ways to teach microelectronic processing using interactive multimedia at the Georgia Institute of Technology. Our overall vision is to develop a Virtual Cleanroom, in which a student can use a high-performance multimedia workstation (equipped with the necessary audio, video, and graphics capabilities) to follow a semiconductor wafer through a complete processing sequence-from bare silicon to finished IC