• DocumentCode
    977373
  • Title

    Using direct-tunneling mechanism to suppress hysteresis effect in floating-body partially depleted SOI devices

  • Author

    Chen, Shiao-Shien ; Huang-Lu, Shiang ; Tang, Tien-Hao

  • Author_Institution
    Device Eng. Dept., United Microelectron. Corp., Hsinchu, Taiwan
  • Volume
    25
  • Issue
    5
  • fYear
    2004
  • fDate
    5/1/2004 12:00:00 AM
  • Firstpage
    331
  • Lastpage
    333
  • Abstract
    Considering the direct-tunneling mechanism, the hysteresis effect in ultrathin gate-oxide floating-body partially depleted (PD) silicon-on-insulator (SOI) devices is investigated. For H-gate PD SOI, owing to the converse poly-gate beside the body terminal, the influence of the direct-tunneling mechanism on the floating-body potential can no longer be overlooked. Based on the measured results, for ultrathin gate-oxide H-gate PD SOI devices, the floating-body potential is dominated by the direct-tunneling mechanism and appears highly gate voltage-dependent. As compared to the amount of the accumulation tunneling charges, the variation between the generation and recombination processes that causes the hysteresis behavior can be ignored. Therefore, the hysteresis effect is suppressed.
  • Keywords
    hysteresis; silicon-on-insulator; tunnelling; H-gate PD SOI; accumulation tunneling charges; body terminal; converse polygate; direct tunneling mechanism; floating body potential; floating-body partially depleted SOI devices; gate voltage-dependent; hysteresis effect suppression; ultrathin gate-oxide; Delay; Electrons; Hysteresis; MOSFETs; Research and development; Semiconductor thin films; Silicon on insulator technology; Thin film circuits; Threshold voltage; Tunneling;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2004.827284
  • Filename
    1295124