DocumentCode
977373
Title
Using direct-tunneling mechanism to suppress hysteresis effect in floating-body partially depleted SOI devices
Author
Chen, Shiao-Shien ; Huang-Lu, Shiang ; Tang, Tien-Hao
Author_Institution
Device Eng. Dept., United Microelectron. Corp., Hsinchu, Taiwan
Volume
25
Issue
5
fYear
2004
fDate
5/1/2004 12:00:00 AM
Firstpage
331
Lastpage
333
Abstract
Considering the direct-tunneling mechanism, the hysteresis effect in ultrathin gate-oxide floating-body partially depleted (PD) silicon-on-insulator (SOI) devices is investigated. For H-gate PD SOI, owing to the converse poly-gate beside the body terminal, the influence of the direct-tunneling mechanism on the floating-body potential can no longer be overlooked. Based on the measured results, for ultrathin gate-oxide H-gate PD SOI devices, the floating-body potential is dominated by the direct-tunneling mechanism and appears highly gate voltage-dependent. As compared to the amount of the accumulation tunneling charges, the variation between the generation and recombination processes that causes the hysteresis behavior can be ignored. Therefore, the hysteresis effect is suppressed.
Keywords
hysteresis; silicon-on-insulator; tunnelling; H-gate PD SOI; accumulation tunneling charges; body terminal; converse polygate; direct tunneling mechanism; floating body potential; floating-body partially depleted SOI devices; gate voltage-dependent; hysteresis effect suppression; ultrathin gate-oxide; Delay; Electrons; Hysteresis; MOSFETs; Research and development; Semiconductor thin films; Silicon on insulator technology; Thin film circuits; Threshold voltage; Tunneling;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2004.827284
Filename
1295124
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