Process optimization tweaking tool (POTT) and its application in controlling oxidation thickness

Author

Guldi, Richard L. ; Jenkins, C. Dean ; Oamminga, G.M. ; Baum, Thomas A. ; Foster, Thomas A.

Author_Institution

Texas Instrum., Dallas, TX, USA

Volume

2

Issue

2

fYear

1989

fDate

5/1/1989 12:00:00 AM

Firstpage

54

Lastpage

59

Abstract

This computer utility extracts process data from a manufacturing statistical process control database, calculates oxidation times appropriate to recenter the thickness to the desired process mean, and inserts the values of new oxidation times directly into furnace oxidation recipes resident in the main BTU host computer so that production furnace recipes downloaded to the furnace controller automatically contain the new oxidation times. The major attributes of POTT are summarized and its application in controlling oxidation thickness for silicon integrated-circuit fabrication as well as results obtained using two different retargeting strategies are described

Keywords

integrated circuit manufacture; oxidation; process computer control; statistical process control; POTT; Si; furnace controller; furnace oxidation recipes; integrated-circuit fabrication; manufacturing statistical process control database; oxidation thickness; oxidation times; process data; process optimization tweaking tool; retargeting strategies; Application software; Automatic control; Computer aided manufacturing; Data mining; Furnaces; Manufacturing automation; Manufacturing processes; Oxidation; Process control; Thickness control;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.24929

Filename

24929