DocumentCode
985578
Title
Composition control in proton-exchanged LiNbO3
Author
Jackel, J.L. ; Rice, C.E. ; Veselka, J.J.
Author_Institution
Bell Laboratories, Holmdel, USA
Volume
19
Issue
10
fYear
1983
Firstpage
387
Lastpage
388
Abstract
The amount of hydrogen in Li1¿xHxNbO3 layers prepared by proton exchange of LiNbO3 in benzoic acid melts can be limited by adding lithium compounds to the melt. Limiting exchange prevents surface damage, a problem primarily affecting y-cut substrates, and reduces scattering in exchanged guides.
Keywords
chemical exchanges; crystal growth from melt; lithium compounds; spectrochemical analysis; surface acoustic wave devices; H ion concentration; Li1-xHxNbO3 layers; LiNbO3; SAW devices; benzoic acid melts; chemical exchange; composition control; crystal growth; exchanged guides; proton exchange; spectrochemical analysis; surface damage prevention; y-cut substrates;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19830268
Filename
4247720
Link To Document