Microelectrode array fabrication by electrical discharge machining and chemical etching

Author

Fofonoff, Timothy A. ; Martel, Sylvain M. ; Hatsopoulos, Nicholas G. ; Donoghue, John P. ; Hunter, Ian W.

Author_Institution

Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA

Volume

51

Issue

6

fYear

2004

fDate

6/1/2004 12:00:00 AM

Firstpage

890

Lastpage

895

Abstract

Wire electrical discharge machining (EDM), with a complementary chemical etching process, is explored and assessed as a method for developing microelectrode array assemblies for intracortically recording brain activity. Assembly processes based on these methods are highlighted, and results showing neural activity successfully recorded from the brain of a mouse using an EDM-based device are presented. Several structures relevant to the fabrication of microelectrode arrays are also offered in order to demonstrate the capabilities of EDM.

Keywords

arrays; bioelectric potentials; biological techniques; biomedical electrodes; brain; electrical discharge machining; etching; microelectrodes; neurophysiology; brain activity recording; chemical etching; electrical discharge machining; microelectrode array fabrication; mouse brain; neural activity; Assembly; Brain; Chemical processes; Disk recording; Etching; Fabrication; Machining; Mice; Microelectrodes; Wire; Action Potentials; Animals; Cerebral Cortex; Electrochemistry; Electrodes, Implanted; Equipment Design; Equipment Failure Analysis; Manufactured Materials; Mice; Microelectrodes; Nanotechnology; Nerve Net; Neurons;

fLanguage

English

Journal_Title

Biomedical Engineering, IEEE Transactions on

Publisher

ieee

ISSN

0018-9294

Type

jour

DOI

10.1109/TBME.2004.826679

Filename

1300779