• DocumentCode
    994289
  • Title

    Integrated optics processing: uses of an EDTA etch solution

  • Author

    Murphy, E.J. ; Minford, W.J. ; Rice, T.C.

  • Author_Institution
    AT&T Bell Laboratories, Allentown, USA
  • Volume
    20
  • Issue
    19
  • fYear
    1984
  • Firstpage
    760
  • Lastpage
    761
  • Abstract
    A new processing step with important implications in LiNbO3 waveguide device fabrication is reported. The combination of an EDTA solution and photomasking is used to etch titanium and form novel waveguide structures allowing local control of the propagation constant and optical mode profile. Several applications are discussed.
  • Keywords
    etching; integrated optics; lithium compounds; optical waveguides; titanium; EDTA etch solution; LiNbO3 waveguide device fabrication; Ti etching; applications; integrated optics processing; local control of optical mode profile; local control of propagation constant; optical waveguides; photomasking; processing step; waveguide structures;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19840517
  • Filename
    4249024
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=994289