DocumentCode
995818
Title
Kinetic model of a low-pressure N2-O2 flowing glow discharge
Author
Gordiets, Boris F. ; Ferreira, Carlos M. ; Guerra, Vasco L. ; Loureiro, Jorge M A H ; Nahorny, Jacimar ; Pagnon, Daniel ; Touzeau, Michel ; Vialle, Marinette
Author_Institution
Centro de Electrodinamica, Inst. Superior Tecnico, Lisbon, Portugal
Volume
23
Issue
4
fYear
1995
fDate
8/1/1995 12:00:00 AM
Firstpage
750
Lastpage
768
Abstract
A self-consistent kinetic model is developed to study dc flowing glow discharges in N2/O2 mixtures. This model includes the calculation of electron energy distribution functions and electron rate coefficients coupled with detailed vibrational kinetics of N2 molecules, chemical kinetics taking into account a large set of neutral, excited and charged species, interaction of N and O atoms at the discharge tube wall, and the thermal balance of the discharge. The results of this model agree reasonably well with the measurements of the electronic density, the gas temperature, the reduced electric field, the vibrational temperature of N2 and the concentration of O, N atoms, NO molecules, N2(C), N2 +(B), and NO(γ) excited states. The comparison was performed in a N2-O2 discharge at pressure p=2 Torr, for discharge currents I=15, 30, and 80 mA, a flow rate Q=100 sccm, and O2 percentages ranging from 0 up to 100%,
Keywords
glow discharges; nitrogen; oxygen; plasma; plasma collision processes; plasma flow; plasma kinetic theory; plasma-wall interactions; 15 mA; 2 torr; 30 mA; 80 mA; DC flowing glow discharges; N2-O2; charged species; chemical kinetics; discharge currents; discharge tube wall; electron energy distribution functions; electron rate coefficients; electronic density; excited species; excited states; flow rate; flowing glow discharge; gas temperature; low-pressure discharge; neutral species; reduced electric field; self-consistent kinetic model; thermal balance; vibrational kinetics; vibrational temperature; Atomic measurements; Chemicals; Density measurement; Distribution functions; Electric variables measurement; Electron tubes; Glow discharges; Kinetic theory; Temperature; Vibration measurement;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.467998
Filename
467998
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