• Record number
    1464
  • Author

    Kiyotaka, Wasa

  • Creator Role
    نويسنده
  • Title

    Handbook of sputter deposition technology: principles, Technology and Applications

  • Publication
    New Jersey Noyes Publications
  • Published Year
    1992
  • Fierst Pages
    0
  • Main Pages
    304
  • Collation
    304
  • Notes
    621.38152^cW3 , Glossary
  • Reprint
    False
  • Contents
    0
  • Print issue
    0
  • Added entries
    AU نويسنده Hayakawa, Shigeru
  • Subject

    Cathode sputtering )plating process(+Thin films

  • Class
    621.38152
  • CutterNumber
    W3
  • Language
    انگليسي