Control of chemical bonding of the ZnO surface grown by molecular beam epitaxy

Toward the fabrication of enzyme modified field effect transistors (EnFETs) as one of organic/inorganic hybridized structures, surface bonding of the ZnO grown by molecular beam epitaxy was controlled by ex situ treatments. Angle resolved Xray photoelectron spectroscopy (XPS) measurement revealed that O–H bonds exist at the surface of ZnO. It was found that the number of O–H bond could be changed with reversibility using plasma and thermal treatments