Erbium-doped thin amorphous carbon films prepared by mixed CVD sputtering

Carbon possesses the unique property to get hybridized in two different forms: the sp2 and the sp3. Moreover, carbon easily bonds with hydrogen and other chemical elements to form carbon-based materials with different properties. Here, Er3þ-doped amorphous hydrogenated carbon (a-C:H) films deposited via a mixed CVD magnetron sputtering process are studied. The deposition parameters are related to the physical and optical properties of the Er-doped carbon films.