Abstract :
Using noncontact atomic force microscopy (NC-AFM), we have succeeded in imaging two-dimensional (2D) Ge islands as
well as Ge atom clusters on Si(1 1 1)-(7 7) surface with atomic resolution. We have investigated the tip-sample distance
dependence of NC-AFM images of oxygen adsorbed Si(1 1 1)-(7 7) surface, and achieved the chemical distinction between
oxygen and Si atom species. Besides, using a soft nanoindentation based on the NC-AFM method for mechanically
manipulating Si adatoms of the Si(1 1 1)-(7 7) surface, we have achieved atom removal, i.e., vertical manipulation, at
tip and sample temperature of 78 K as well as at room temperature (RT). In addition, as an application of this soft
nanoindentation method, we have produced the lateral displacement of Si adatoms towards metastable positions in the half
unit cell of the Si(1 1 1)-(7 7) reconstruction at 78 K.
Keywords :
Noncontact atomic force microscopy (NC-AFM) , Atom manipulation , Atom distinction , Atomic resolution , Nanoindentation , Mechanical atommanipulation