Title of article
PLD thin films obtained from CrO3 and Cr8O21 targets
Author/Authors
F. Guinneton، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
6
From page
139
To page
144
Abstract
Thin films of chromium oxides mixtures have been grown on sapphire substrates using pulsed laser deposition (PLD). The
work originates from the goal of enhancing the CrO2 concentration in the films deposited from targets made of various chromium
oxides. Their stability depends on temperature and pressure conditions. The PLD experiments are reviewed with the aim of
discussing the influence of the target composition and of the deposition conditions upon the resulted films. The targets and
corresponding thin films have been characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic
force microscopy (AFM) and Raman spectroscopy. The Cr8O21 targets are the most stable, which allows the preparation of thin
films with a reproducible CrO2 content of about 25% and a satisfactory surface morphology
Keywords
AFM , Chromium oxides , PLD , XRD , thin films , Raman spectroscopy , SEM
Journal title
Applied Surface Science
Serial Year
2005
Journal title
Applied Surface Science
Record number
1001091
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