Design, analysis and fabrication of a new MEMS scanning device actuator

In this paper, an improved mechanical device for producing a large angular movement of an optical element is described. The device can be used either for angular positioning or as a dynamic angular deflecting driver for optical components or systems. The device was designed using graph-presentation methods and numerical finite element method (FEM). The device was fabricated and tested as an angular driver of thin-film tilt interference filter for dense-wavelength division demultiplexing systems (DWDM) applications. Scaling-down analysis was carried out to show micro-electro-mechanical-systems (MEMS) suitability.