Author/Authors :
T. Butz *، نويسنده , , Ch. Meinecke، نويسنده , , M. Morawski، نويسنده , , T. Reinert، نويسنده , ,
M. Schwertner، نويسنده , , D. Spemann، نويسنده , , J. Vogt، نويسنده ,
Abstract :
This contribution deals with the morphological and elemental characterisation with high-energy (MeV) focused ion beams
(in particular protons) with special emphasis on high spatial resolution in the sub-micrometer regime and very low minimum
detection limits (sub-ppm) in trace element analysis. The most important methods like particle induced X-ray emission (PIXE),
Rutherford backscattering spectrometry (RBS), as well as scanning transmission ion microscopy (STIM) and STIM-tomography
will be illustrated by examples from material and life sciences
Keywords :
Particle induced X-ray emission (PIXE) , Rutherford backscattering spectrometry (RBS) , thin films , Ion probe
