Title of article
Determination of layer thickness with mXRF
Author/Authors
Carla Vogt، نويسنده , , Rainer Dargel، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
4
From page
53
To page
56
Abstract
The significance of thin films in modern high tech applications requires fast and nondestructive analysis. A method to
determine the thickness of single layers with mXRF via a calibration procedure is described. The influences of surface roughness
and the angle of the incident beam on the intensity of the fluorescence radiation are discussed
Keywords
Thin films , Layer thickness , TIN , MicroXRF
Journal title
Applied Surface Science
Serial Year
2005
Journal title
Applied Surface Science
Record number
1001411
Link To Document