Abstract :
Both cracked and crack-free GaN/Al0.55Ga0.45N multiple quantum wells (MQWs) grown on GaN template by metalorganic
chemical vapor deposition have been studied by triple-axis X-ray diffraction, grazing-incidence X-ray reflectivity, atomic force
microscope, photoluminescence spectroscopy and low-energy positron annihilation spectroscopy. The experimental results
show that cracks generation not only deteriorates the surface morphology, but also leads to a period dispersion and roughens the
interfaces of MQWs. The mean density of dislocations in MQWs, determined from the average full-width at half-maximum of
v-scan of each satellite peak, has been significantly enhanced by the cracks generation. Furthermore, the measurement of
annihilation-line Doppler broadening reveals a higher concentration of negatively charged vacancies in the cracked MQWs. The
combination of these vacancies and the high density of edge dislocations are assumed to contribute to the highly enhanced
yellow luminescence in the cracked sample.
Keywords :
nitrides , Multiple quantum wells , Cracks , Dislocations , Vacancies , X-ray diffraction