Title of article :
In situ monitoring and benchmarking in UHV of InP/GaAsSb
heterointerface reconstructions prepared via MOVPE
Author/Authors :
Z. Kollonitsch، نويسنده , , H.-J. Schimper، نويسنده , , U. Seidel، نويسنده , , F. Willig، نويسنده , , T. Hannappel، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Abstract :
Thin InP layers were grown by metalorganic vapor phase epitaxy on the ternary compound GaAs0.5Sb0.5 lattice matched to
InP(1 0 0). The heterojunctions were studied with in situ reflectance anisotropy spectroscopy and benchmarked in ultrahigh
vacuum with ultraviolet and X-ray photoelectron spectroscopy and low energy electron diffraction with regard to the sharpness
of the interface. During growth of GaAs0.5Sb0.5 an Sb-rich ð1 3Þ-like reconstruction was observed and during stabilization
with TBAs an As-rich cð4 4Þ reconstruction. These two different reconstructions of GaAs0.5Sb0.5(1 0 0), well-known from the
binaries GaSb(1 0 0) and GaAs(1 0 0) respectively, were used for preparing InP/GaAs0.5Sb0.5 heterojunctions. The RA spectra
of thin heteroepitaxial InP layers were compared to a well-established RA spectrum of MOVPE-prepared homoepitaxial,
ð2 1Þ-like reconstructed P-rich InP(1 0 0), that was used as a reference spectrum of a well defined surface. Growing InP on the
cð4 4Þ reconstructed GaAsSb(1 0 0) surface resulted in a significantly sharper interface than InP growth on ð1 3Þ
reconstructed GaAsSb(1 0 0).
Keywords :
low energy electron diffraction , surface reconstruction , Semiconducting ternary compounds , Metalorganic vapor phase epitaxy , antimonides , Reflectance anisotropy spectroscopy
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science