Title of article
Laser ablation of toluene liquid for surface micro-structuring of silica glass
Author/Authors
H. Niino *، نويسنده , , Y. Kawaguchi، نويسنده , , T. Sato، نويسنده , , A. Narazaki، نويسنده , , T. Gumpenberger، نويسنده , , R. Kurosaki، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
5
From page
4387
To page
4391
Abstract
Microstructures with well-defined micropatterns were fabricated on the surfaces of silica glass using a laser-induced backside wet etching
(LIBWE) method by diode-pumped solid state (DPSS) UV laser at the repetition rate of 10 kHz. For a demonstration of flexible rapid prototyping
as mask-less exposure system, the focused laser beam was directed to the sample by galvanometer-based point scanning system. Additionally, a
diagnostics study of plume propagation in the ablated products of toluene solid film was carried out with an intensified CCD (ICCD) camera.
Keywords
Diode-pumped solid state UV laser , Silica glass , UV absorption , Laser-induced backside wet etching (LIBWE)
Journal title
Applied Surface Science
Serial Year
2006
Journal title
Applied Surface Science
Record number
1001997
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