• Title of article

    Laser ablation of toluene liquid for surface micro-structuring of silica glass

  • Author/Authors

    H. Niino *، نويسنده , , Y. Kawaguchi، نويسنده , , T. Sato، نويسنده , , A. Narazaki، نويسنده , , T. Gumpenberger، نويسنده , , R. Kurosaki، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2006
  • Pages
    5
  • From page
    4387
  • To page
    4391
  • Abstract
    Microstructures with well-defined micropatterns were fabricated on the surfaces of silica glass using a laser-induced backside wet etching (LIBWE) method by diode-pumped solid state (DPSS) UV laser at the repetition rate of 10 kHz. For a demonstration of flexible rapid prototyping as mask-less exposure system, the focused laser beam was directed to the sample by galvanometer-based point scanning system. Additionally, a diagnostics study of plume propagation in the ablated products of toluene solid film was carried out with an intensified CCD (ICCD) camera.
  • Keywords
    Diode-pumped solid state UV laser , Silica glass , UV absorption , Laser-induced backside wet etching (LIBWE)
  • Journal title
    Applied Surface Science
  • Serial Year
    2006
  • Journal title
    Applied Surface Science
  • Record number

    1001997