Molecular secondary ion formation under cluster bombardment: A fundamental review

A brief review is given regarding the application of cluster ion beams as desorption probes in molecular SIMS. The general observation is that the efficiency of secondary ion formation, particularly that of complex molecular species, is significantly enhanced if polyatomic projectiles are employed instead of atomic species. Apart from the sensitivity increase, cluster bombardment also appears to allow for molecular depth profiling studies without the accompanying damage accumulation normally associated with atomic projectiles. A few fundamental aspects are addressed in an attempt to highlight the physics behind these observations. It appears that much of the benefit associated with cluster bombardment is connected to the fact that these projectiles give access to very high sputter yields which are not accessible with atomic primary ions.