Effect of laser power on orientation and microstructure of Ba2TiO4 film prepared by laser chemical vapor deposition

Ba2TiO4 films were prepared on Pt/Ti/SiO2/Si substrates by laser chemical vapor deposition method. The effect of laser power (PL) on orientation and microstructure was investigated. With increasing PL from 52 to 93 W, the deposition temperature (Tdep) increased from 845 to 946 K. With increasing Tdep from 845 to 927 K, the preferred orientation of Ba2TiO4 films changed from (0 9 1) to (1 0 3), the surface morphologies changed from faceted to rectangular, and the columnar cross-section became thicker. The films prepared at high Tdep (931–946 K) had the porous cross-section consisted of powder-like grains. Ba2TiO4 film prepared at 881 K had high deposition rate (Rdep) of 51.4 μm h−1, which was advantageous to industrial production.