Laser assisted fabrication of random rough surfaces for optoelectronics

Optical surface structuring shows great interest for antireflective or scattering properties. Generally, fabricated surface structures are periodical but random surfaces that offer new degrees of freedom and possibilities by the control of their statistical properties. We propose an experimental method to create random rough surfaces on silicon by laser processing followed by etching. A photoresist is spin coated onto a silicon substrate and then exposed to the scattering of a modified laser beam. The beam modification is performed by using a micromirror matrix allowing laser beam shaping. An example of tuning is presented. An image composed of two white circles with a black background is displayed and the theoretical shape of the correlation is calculated. Experimental surfaces are elaborated and the correlation function calculated from height mapping. We finally compared the experimental and theoretical correlation functions.