Author/Authors :
G. Socol، نويسنده , , M. Socol، نويسنده , , N. Stefan، نويسنده , , E. Axente، نويسنده , , G. Popescu-Pelin، نويسنده , , Gabriela D. Craciun، نويسنده , , L. Duta، نويسنده , , C.N. Mihailescu، نويسنده , , Shyh-Lin Tsao and I.N. Mihailescu، نويسنده , , A. Stanculescu، نويسنده , , D. Visan، نويسنده , , V. Sava، نويسنده , , A.C. Galca، نويسنده , , C.R Luculescu، نويسنده , , V. Craciun، نويسنده ,
Abstract :
The influence of target–substrate distance during pulsed laser deposition of indium zinc oxide (IZO), indium tin oxide (ITO) and aluminium-doped zinc oxide (AZO) thin films grown on polyethylene terephthalate (PET) substrates was investigated. It was found that the properties of such flexible transparent conductive oxide (TCO)/PET electrodes critically depend on this parameter. The TCO films that were deposited at distances of 6 and 8 cm exhibited an optical transmittance higher than 90% in the visible range and electrical resistivities around 5 × 10−4 Ω cm. In addition to these excellent electrical and optical characteristics the films grown at 8 cm distance were homogenous, smooth, adherent, and without cracks or any other extended defects, being suitable for opto-electronic device applications.
Keywords :
Thin films , PLD , Flexible TCO , AZO , IZO , ITO , PET
