Title of article
Preparation and characterization of TaNbTiW multi-element alloy films
Author/Authors
Xingguo Feng، نويسنده , , Guangze Tang، نويسنده , , Le Gu، نويسنده , , Xinxin Ma*، نويسنده , , Mingren Sun، نويسنده , , Liqin Wang، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2012
Pages
7
From page
447
To page
453
Abstract
In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of −0.1 to −2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.
Keywords
Multi-elements alloy films , Hardness , Multi-targets magnetron sputtering , structure
Journal title
Applied Surface Science
Serial Year
2012
Journal title
Applied Surface Science
Record number
1005930
Link To Document