Excimer laser patterning of PEDOT:PSS thin-films on flexible barrier foils: A surface analysis study

Selective laser patterning of thin organic films is an important aspect in the roll-to-roll production of organic electronic devices such as organic light emitting diodes (OLEDs). An excimer laser is well suited for the patterning and structuring of polymer thin films as their UV absorption is significant. Selective removal of a transparent conducting polymer PEDOT:PSS (poly(3,4-ethylene dioxythiophene):polystyrene sulfonate) on a multilayered (inorganic–organic–inorganic) barrier and a flexible PEN (polyethylene napthalate) substrate has been studied using a KrF excimer laser. The ablation craters were characterized with electron microscopy and profilometry. For the first time, chemical surface analysis of the patterned area was performed with Time-Of-Flight Static Secondary Ion Mass Spectrometry (TOF-S-SIMS), providing a detailed insight of the surface composition after laser ablation and plasma post-treatments.