Stoichiometry dependence of the optical properties of amorphous-like InimageGaimageZn1−xO1+0.5x−δ thin films

The paper investigates the dependence of the optical properties on cation concentration of amorphous-like indium gallium zinc oxide thin films (InimageGaimageZn1−xO1+0.5x−δ) with various (In + Ga)/(In + Ga + Zn) and Ga/(In + Ga) ratios obtained by pulsed laser deposition. X-ray reflectivity and spectroscopic ellipsometry thickness results were in good agreement. The proportionality between density and the refractive index in the transparency range is evidenced. The extracted physical parameters are clearly influenced by the variation of cation concentration.