Title of article
Boron and nitrogen co-doping of diamond-like carbon film for transparent conductive films
Author/Authors
Wooseok Song، نويسنده , , Yooseok Kim، نويسنده , , Dae Sung Jung، نويسنده , , Su Il Lee، نويسنده , , Woosung Jung، نويسنده , , O.-Jin Kwon، نويسنده , , Heun Ku Kim، نويسنده , , Mi-Sun Kim، نويسنده , , Ki-Seok An، نويسنده , , Chong-Yun Park، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
6
From page
53
To page
58
Abstract
We demonstrate boron and nitrogen co-doping of diamond-like carbon (DLC) film by vaporizing borane ammonia for applications in anti-scratch and extremely robust transparent conductive films. This method allows for facile fabrication of boron and nitrogen co-doped DLC (BNDLC) film with ultra-flat surface and uniform thickness. The simultaneous occurrence of graphitization and boron and nitrogen co-doping of DLC film induced by increasing the co-doping temperature was observed and lead to a significant decrease in the sheet resistance. As a result, the sheet resistance and optical transmittance at 550 nm of the BNDLC were 3.53 ± 0.19 kΩ/sq and 81.25%, respectively.
Keywords
Diamond-like carbon , Co-doping , Transparent conductive films
Journal title
Applied Surface Science
Serial Year
2013
Journal title
Applied Surface Science
Record number
1007937
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